NT11.XY is a small-volume xy motion piezo stage. It adopts a no-friction flexible hinge guiding mechanism and amplified-drive mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level.
Specfications:
Model: NT11.XY100
Motion: XY
Displacement: 100μm
Sensor: SGS
Closed loop resolution: 3nm
Unloaded resonant frequency: X0.2/Y0.3KHZ
Push/pull force: 25/10N
El. capacitance: 1.8μF/axis
Material: Steel, Aluminum